Equipment list by category

Equipment

Etching

Tool

Make

Model

Contact person

ICP-RIE

Oxford

PlasmaPro 100 Cobra

X. Wang

Plasma Asher

PVA TePla

IoN Wave 10

X. Wang

 

Deposition

Tool

Make

Model

Contact person

E-beam/Thermal Evaporation

AJA

ATC-2036-E

X. Wang

 

Lithography

Tool

Make

Model

Contact person

Laser Writer

KLOE

Dilase 650

X. Wang

Mask Aligner 

KLOE

UV-KUB 3

X. Wang

Spin Coater

Westar

ProSpin-8e-HT-DM

X. Wang

 

Metrology

Tool

Make

Model

Contact person

Optical Profiler

Bruker

ContourX-200

X. Wang

Stylus Profiler

Bruker

Dektak-A

X. Wang

Probe Station

MPI

ITS150

X. Wang

Optical Microscope

Laxco

LMC-5000

X. Wang

Packaging

Tool

Make

Model

Contact person

Wire Bonder 

TPT

HB05

X. Wang

Wet Benches

Tool

Make

Model

Contact person

Base Hood

Air Control

Microvoid

X. Wang

Acid Hood

Air Control

Microvoid

X. Wang

Lithography Hood

Air Control

Microvoid

X. Wang

 

Medical Devices

Tool

Make

Model

Contact person

Plate Reader

Tecan

Spark

X. Wang

Plate Washer

Tecan

HydroSpeed

X. Wang

Electrochemical Analyzer

Gamry

Reference 600+

X. Wang