Equipment Type
Spin coater

Manufacturer
Westar

Model
ProSpin-8e-HT-DM

Specifications

• Spin speed 0-8,000 rpm
• Spin speed acceleration
• 100-12,000 rpm

The ProSpin-8e-HT-DM spin coater is located in the solvent hood. It comes with a 306mm I.D. chamber that will handle wafers up to 8“and substrates up to 6” x 6”. Multiple chucks are available for different sizes of wafers, wafer pieces, and Photomasks.