Timeline
This page shows the construction progress of the MIC cleanroom.
Timeline
|
Progress Name |
Time |
Instrument delivery |
Instrument installation |
Details |
|
100% design drawing |
03/07/2021-05/10/2021 |
|
|
|
|
Contactor bid |
05/10/2021-07/29/2021 | |||
|
Detailed construction plan provide |
07/29/2021-10/15/2021 | |||
|
Construction in progress |
10/18/2021-02/31/2022 | Construction is expected to finish by end of March, 2022 | ||
|
Bruker profilers delivery |
TBD |
N |
N |
|
|
Laxco microscope delivery |
Delivered
|
Y |
N |
Instruments have been delivered |
|
Air Control wet benches delivery |
TBD
|
N |
N |
|
|
KLOE mask aligner and laser writer delivery |
TBD
|
N |
N |
|
|
AJA E-beam deposition delivery |
TBD
|
N |
N |
|
|
Oxford ICP-RIE delivery |
TBD
|
N |
N |
|