Equipment Type
Plasma Asher

Manufacturer
PVA TePla

Model
IoN Wave 10

Processes
Gases: CF4, O2, Ar

The IoN Wave 10 Plasma Asher is configured with a 1,000-watt air-cooled 2.45 GHz microwave power supply. It is capable of photoresist ashing and descum, SU-8 removal at a lower temperature, etching of passivation layers, device decapsulation, surface cleaning, and surface activation.

The system also comes with a cool plate, which allows fine control of the temperature within 0.5 °C.