E-beam/Thermal Evaporation

Overview

Equipment Type
E-beam/Thermal Evaporation

Manufacturer
AJA International

Model
ATC-2036-E

Processes
Approved materials: Al, Al2O3, Cr, Co, Cu, Ge, Ag, In, Fe, Ni, Nb, Pd, Pt, Fe/Ni, Ag, Ti, Yt, Si, SiO2

The AJA ATC-2036-E is capable of both E-Beam evaporation and thermal evaporation. It is equipped with both a 6-pocket 15cc rotary E-beam source and multi-pocket thermal evaporation source. The system allows depositing multiple metals as well as Si, SiO2, and transition metal oxide on wafers up to 6” in diameter. The atmospheric camera mounted on the viewport with display allows the viewing of crucible melt.