Equipment Type
Stylus Profiler

Manufacturer
Bruker

Model
Dektak DXT-A

Specifications

• Motorized X/Y stage with 6inches of travel, motorized 360 degree rotation
• 2-3, 4-6, or 8" vacuum chuck
• LIS 3, low inertia sensor with 1 to 15mg of force
• 3.1Mpixel color camera with selectable magnification
• Stylus radius (2um and 12.5um)
• Optically flat scan block with 55mm scan length
• 4 angstrom step height repeatability, 1 sigma on 1um step
• Stitching for up to 200mm scans
• 3D map collection and extensive data analysis
• Automated collection capabilities with unlimited number of locations

The Dektak DXT-A is an Automatic stylus that can be used to measure step height with 4 angstroms repeatability. It also has 2D stress measurement capability.