Manufacturer:
Bruker
Model:
Dektak XT-E
Overview
Equipment Type
Stylus Profiler
Manufacturer
Bruker
Model
Dektak XT-E
Specifications
- Manual X/Y stage with 4 inches of travel, no rotation available
- 4-inch standard sample platform
- LIS 3, low inertia sensor with 1 to 15mg of force
- 3.1Mpixel color camera with selectable magnification
- Stylus radius (12.5um)
- Optically flat scan block with 55mm scan length
- 4 angstrom step height repeatability, 1 sigma on 1um step
The Dektak XT-E is a manual stylus that can be used to measure step height with 4 angstroms repeatability. It also has 2D stress measurement capability.