Stylus Profiler
Manufacturer:
Bruker
Model:
Dektak XT-E
Overview
Equipment Type
Stylus Profiler
Manufacturer
Bruker
Model
Dektak DXT-A
Specifications
- Motorized X/Y stage with 6inches of travel, motorized 360 degree rotation
- 2-3, 4-6, or 8" vacuum chuck
- LIS 3, low inertia sensor with 1 to 15mg of force
- 3.1Mpixel color camera with selectable magnification
- Stylus radius (2um and 12.5um)
- Optically flat scan block with 55mm scan length
- 4 angstrom step height repeatability, 1 sigma on 1um step
- Stitching for up to 200mm scans
- 3D map collection and extensive data analysis
- Automated collection capabilities with unlimited number of locations
The Dektak DXT-A is an Automatic stylus that can be used to measure step height with 4 angstroms repeatability. It also has 2D stress measurement capability.