Equipment Type
UV LED Mask aligner

Manufacturer
KLOE

Model
UV-KUB 3

Specifications

• Wafer size: 100mm or smaller
• Exposure modes: hard contact, soft contact
• Mask size:  5”x5”
• Available Exposure Wavelengths: 365nm

The KLOE UV-KUB 3 is a compact table-top UV LED Mask aligner system. The system uses cold UV exposure and real-time in-situ temperature control of the substrate environment providing homogenous exposure over the whole surface, eliminating any undesirable thermal effects. The system is ideal for applications dealing with microfluidics, optics, biotechnology, microelectronics, etc.